Alternate electrical tests for extracting mechanical parameters of MEMS accelerometer sensors

Proceedings of the IEEE VLSI Test Symposium

Volumn 2006, Issue , 2006, Pages 192-197

  Natarajan, Vishwanath ^a   Bhattacharya, Soumendu ^a   Chatterjee, Abhijit ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL TEST STIMULUS; MECHANICAL PARAMETERS; THIN FILM MICROMACHINING;

INTELLIGENT MATERIALS; MAPPING; MICROELECTROMECHANICAL DEVICES; PARAMETER ESTIMATION; THIN FILMS;

MICROMACHINING;

EID: 33751117532     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/VTS.2006.16     Document Type: Conference Paper

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