MD simulation of ion implantation damage in AlGaAs: I. Displacement energies

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 252, Issue 2, 2006, Pages 190-196

  Gartner K ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

Author keywords

AlGaAs; Computer simulation; Displacement energy; Point defects; Radiation damage

Indexed keywords

ALUMINUM COMPOUNDS; COMPUTER SIMULATION; ION IMPLANTATION; MOLECULAR DYNAMICS; POINT DEFECTS;

DISPLACEMENT ENERGY; FRENKEL PAIRS;

RADIATION DAMAGE;

EID: 33751106460     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.08.016     Document Type: Article

References (16)

1. Tan H.H., Jagadish C., Williams J.S., Zou J., Cockayne D.J.H., and Sikorski A. J. Appl. Phys. 77 (1995) 87
2. Sayed M., Jefferson J.H., Walker A.B., and Cullis A.G. Nucl. Instr. and Meth. B 102 (1995) 218
3. Wendler E., and Gaiduk P.I. Nucl. Instr. and Meth. B 136-138 (1998) 488
4. Turos A., Stonert A., Breeger B., Wendler E., Wesch W., and Fromknecht R. Nucl. Instr. and Meth. B 148 (1999) 401
5. Breeger B., Wendler E., Schubert Ch., and Wesch W. Nucl. Instr. and Meth. B 148 (1999) 468
6. Stonert A., Turos A., Nowicki L., Breeger B., Wendler E., and Wesch W. Nucl. Instr. and Meth. B 175-177 (2001) 219
7. Stonert A., Turos A., Nowicki L., Breeger B., Wendler E., and Wesch W. J. Mod. Phys. B 15 (2001) 1437
8. Smith R. Nucl. Instr. and Meth. B 67 (1992) 335
9. Conrad D., and Scheerschmidt K. Phys. Rev. B 58 (1998) 4538
10. Albe K., Nordlund K., Nord J., and Kuronen A. Phys. Rev. B 66 (2002) 035205
11. Zollo G., Tarus J., and Nieminen R.M. J. Phys.: Condens. Matter 16 (2004) 3923
12. Tersoff J. Phys. Rev. B 39 (1989) 5566
13. Nord J., Nordlund K., Keinonen J., and Albe K. Nucl. Instr. and Meth. B 202 (2003) 93
14. Gärtner K., and Hehl K. Phys. Stat. Sol. (b) 94 (1979) 231
15. Adachi S. J. Appl. Phys. 58 (1985) R1
16. Gao F., Weber W.J., and Devanathan R. Nucl. Instr. and Meth. B 191 (2002) 487