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Volumn 5250, Issue , 2004, Pages 627-636
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VUV mirrors for the (80 - 120 nm) spectral range
a a a b,c a
a
UNIV PARIS SUD
(France)
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Author keywords
Reflectivity; Thin films; Vacuum Ultraviolet
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Indexed keywords
BANDGAP;
VACUUM ULTRAVIOLET;
ALUMINA;
COMPUTER SIMULATION;
HEATING;
LIGHT REFLECTION;
MAGNETIC FIELDS;
MIRRORS;
OPTIMIZATION;
PLASMAS;
THIN FILMS;
VACUUM APPLICATIONS;
ULTRAVIOLET DEVICES;
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EID: 1942489660
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.514441 Document Type: Conference Paper |
Times cited : (14)
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References (6)
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