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Volumn 49, Issue 4, 2006, Pages 1370-1378

Development and characterization of a microcalorimeter based on a Si-N membrane for measuring a small specific heat with submicro-joule precision

(5) Suh, Ki Sung a Kim, Hyung Joon a Park, Yun Daniel a Kim, Kee Hoon a Cheong, Sang Wook b

a Seoul National University (South Korea)

b RUTGERS UNIVERSITY (United States)

Author keywords

Heat capacity; MEMS; Microcalorimeter; Silicon nitride

Indexed keywords

EID: 33751042993 PISSN: 03744884 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (11)

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