Fabrication and characterization of microstructures with optical quality surfaces in fused silica glass using femtosecond laser pulses and chemical etching

Applied Optics

Volumn 45, Issue 28, 2006, Pages 7519-7523

  Sikorski, Yuri ^a   Rablau, Corneliu ^a   Dugan, Mark ^b   Said, Ali A ^b   Bado, Philippe ^b   Beholz, Lars Guenter ^c  

^a KETTERING UNIVERSITY   (United States)

^b TRANSLUME INC   (United States)

^c Beholztech Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FLUIDICS; FUSED SILICA; REFLECTION; WAVEGUIDES;

COMPLEX INTEGRATED DEVICES; FEMTOSECOND LASER PULSES; MICROFLUIDIC CHANNELS;

OPTICAL SYSTEMS;

EID: 33750885388     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.007519     Document Type: Article

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