Optical and compositional analysis of functional SiOxCy:H coatings on polymers

Thin Solid Films

Volumn 515, Issue 4, 2006, Pages 2493-2496

  Martin Palma R J ^a   Gago, R ^b,c   Torres Costa, V ^a   Fernandez Hidalgo P ^d   Kreissig, U ^c   Martinez Duart J M ^a  

^a UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

^b CENTRO DE MICROANÁLISIS DE MATERIALES   (Spain)

^c INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^d HOSPITAL UNIVERSITARI DE BELLVITGE   (Spain)

Author keywords

Elastic recoil detection; Optical coating; Plasma enhanced CVD; Silicon oxycarbide; Visible spectrometry

Indexed keywords

COMPOSITION; LIGHT EXTINCTION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYSILICON; REFRACTIVE INDEX; SILICA;

ELASTIC RECOIL DETECTION; OPHTHALMIC LENSES; SILICON OXYCARBIDE; VISIBLE SPECTROMETRY;

OPTICAL COATINGS;

EID: 33750824555     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.07.082     Document Type: Article

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