〈100〉-textured self-assembled square-shaped polycrystalline silicon grains by multiple shot excimer laser crystallization

Journal of Applied Physics

Volumn 100, Issue 8, 2006, Pages

  He, Ming ^a   Ishihara, Ryoichi ^a   Metselaar, Wim ^a   Beenakker, Kees ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; CRYSTALLIZATION; EXCIMER LASERS; GRAIN BOUNDARIES; SELF ASSEMBLY; SILICON; SOLIDIFICATION;

EXCIMER LASER CRYSTALLIZATION; LIPSS FORMATION; POLYCRYSTALLINE SILICON GRAINS; SQUARE-SHAPED GRAINS;

POLYCRYSTALLINE MATERIALS;

EID: 33750510906     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2358405     Document Type: Article

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