Influence of formaldehyde on the electrochemistry and chemical etching of silicon in alkaline solutions

Acta Chimica Sinica

Volumn 62, Issue 15, 2004, Pages 1415-1418

  Song, Yan Yan ^a   Zhang, Yu ^a   Xia, Xing Hua ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

Chemical etching; Formaldehyde; Oxidizing agent; Pyramid suppression; Silicon

Indexed keywords

EID: 33750510740     PISSN: 05677351     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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