Influence of trace precursors on mass transport and growth rate during sublimation deposition of AlN crystal

Journal of Applied Physics

Volumn 100, Issue 8, 2006, Pages

  Li, Yanxin ^a   Brenner, Donald W ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC TRANSPORT; GROWTH RATE; PATTERNED SUBSTRATES;

DEPOSITION; IMPURITIES; MASS TRANSFER; PHOTOSYNTHESIS; SUBLIMATION; TRACE ELEMENTS;

ALUMINUM NITRIDE;

EID: 33750504492     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2357423     Document Type: Article

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