A simple solution to systematic errors in density determination by X-ray reflectivity: The XRR-density evaluation (XRR-DE) method

Applied Surface Science

Volumn 253, Issue 1 SPEC. ISS., 2006, Pages 28-32

  Bergese, P ^a   Bontempi, E ^a   Depero, L E ^a  

^a UNIVERSITY OF BRESCIA   (Italy)

Author keywords

Density, X ray reflectivity (XRR); Sample goniometer; Thin films; XRR density evaluation (XRR DE)

Indexed keywords

DENSITY MEASUREMENT (SPECIFIC GRAVITY); GONIOMETERS; REFLECTION; REFLECTOMETERS; SYSTEMATIC ERRORS;

X RAY REFLECTIVITY (XRR); XRR DENSITY EVALUATION (XRR-DE);

THIN FILMS;

EID: 33750501807     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.05.067     Document Type: Article

References (14)

1. Seah M.P., et al. Surf. Interf. Anal. 36 (2004) 1269
2. Van der Lee A., Roualdes S., Berjoan R., and Durand J. Appl. Surf. Sci. 173 (2000) 115
3. Wallace W.E., Jacobson D.L., Arif M., and Loffe A. Appl. Phys. Lett. 74 (1999) 469
4. Bontmpi E. Recent Research Development in Chemical Physics vol. 5 (2004), Transworld Research Network, Kerala pp. 461-488
5. Stoev K.N., and Sakurai K. Spectrochim. Acta B 54 (1999) 41
6. Holy V., Pietsch U., and Baumbach T. High Resolution X-ray Scattering from Thin Films and Multilayers (1999), Springer, New York
7. Als-Nielsen J., and McMorrow D. Elements of Modern X-ray Physics (2001), Wiley, Chichester pp. 23, 24, 61-106
8. Wallace W.E., and Wu W.L. Appl. Phys. Lett. 67 (1995) 1203
9. Holy V., Pietsch U., and Baumbach T. High Resolution X-ray Scattering from Thin Films and Multilayers (1999), Springer, New York pp. 17-37, 120-128
10. Holy V., Pietsch U., and Baumbach T. High Resolution X-ray Scattering from Thin Films and Multilayers (1999), Springer, New York p. 127
11. Als-Nielsen J., and McMorrow D. Elements of Modern X-ray Physics (2001), Wiley, Chichester pp. 84-87
12. Holy V., Pietsch U., and Baumbach T. High Resolution X-ray Scattering from Thin Films and Multilayers (1999), Springer, New York pp. 207-219
13. PDF-4/Full File V. 3.03, ICDD, Newton Square, 2004. Card number 21-1227.
14. PDF-4/Full File V. 3.03, ICDD, Newton Square, 2004. Card number 35-0734.