Multilevel pattern generation by GaN laser lithography: An application to beam shaper fabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6290, Issue , 2006, Pages

  Lullo, Giuseppe ^a   Leto, Riccardo ^b   Oliva, Maria ^a   Arnone, Claudio ^a  

^a UNIVERSITY OF PALERMO   (Italy)

^b MICROTECH srl   (Italy)

Author keywords

GaN laser; Laser pattern generator; Laser writing; Microlithography; Multilevel diffractive optics

Indexed keywords

ENERGY EFFICIENCY; GALLIUM NITRIDE; LASER PULSES; LIGHT MODULATION; LITHOGRAPHY;

GAN LASERS; LASER PATTERN GENERATOR; LASER WRITING; MULTILEVEL DIFFRACTIVE OPTICS;

LASER BEAMS;

EID: 33750483965     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.680460     Document Type: Conference Paper

References (12)

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