System for laser writing to lithograph masks for integrated optics

Optical Engineering

Volumn 37, Issue 4, 1998, Pages 1115-1123

  Salgueiro, José Ramón ^a   Roman, Juan Félix ^a,b   Moreno, Vicente ^a  

^a UNIVERSITY OF SANTIAGO DE COMPOSTELA   (Spain)

^b LOUGHBOROUGH UNIVERSITY   (United Kingdom)

Author keywords

Integrated optical elements; Laser writing; Lithography

Indexed keywords

EID: 0009694548     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601945     Document Type: Article

References (17)

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