Side wall anodization of aluminum thin film on silicon substrate

Korean Journal of Chemical Engineering

Volumn 22, Issue 5, 2005, Pages 789-792

  Kim, Kyungtae ^a   Kim, Moonjung ^a   Cho, Sung Min ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Aluminum; Anodization; Anodized Aluminum Oxide (AAO); Electropolishing

Indexed keywords

EID: 29344443845     PISSN: 02561115     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02705800     Document Type: Article

References (9)

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