The influence of substrate on the properties of Er2O3 films grown by magnetron sputtering

Journal of Luminescence

Volumn 121, Issue 2 SPEC. ISS., 2006, Pages 233-237

  Miritello, M ^a   Lo Savio, R ^a   Iacona, F ^b   Franzo G ^a   Bongiorno, C ^b   Irrera, A ^a   Priolo, F ^a  

^a UNIVERSITY OF CATANIA   (Italy)

^b CNR IMM   (Italy)

Author keywords

Erbium oxide; Photoluminescence; Sputtering

Indexed keywords

ANNEALING; DEPOSITION; ERBIUM COMPOUNDS; FILM GROWTH; MAGNETRON SPUTTERING; SILICA;

ANNEALING PROCESSES; OXIDIZED SUBSTRATE; PIT FORMATION; STRUCTURAL PROPERTIES;

THIN FILMS;

EID: 33750338736     PISSN: 00222313     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jlumin.2006.07.018     Document Type: Article

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