Materials selection for micro-electromechanical systems

Materials and Design

Volumn 28, Issue 1, 2007, Pages 246-248

  Guisbiers, G ^a   Wautelet, M ^a  

^a UNIVERSITY OF MONS   (Belgium)

Author keywords

Micro electromechanical systems; Selection for materials properties; Vapor deposition

Indexed keywords

OPTIMIZATION; Q FACTOR MEASUREMENT; RESIDUAL STRESSES; THIN FILMS; VAPOR DEPOSITION;

ASHBY METHODOLOGY; MATERIALS SELECTION; PULL-IN TENSION;

MICROELECTROMECHANICAL DEVICES;

MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; Q FACTOR MEASUREMENT; RESIDUAL STRESSES; THIN FILMS; VAPOR DEPOSITION;

EID: 33750329308     PISSN: 02613069     EISSN: 18734197     Source Type: Journal    
DOI: 10.1016/j.matdes.2005.05.012     Document Type: Article

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