Implantable resonant mass sensor for liquid biochemical sensing

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 347-350

  Zhang, Hao ^a   Marma, Mong S ^b   Kim, Eun Sok ^a   McKenna, Charles E ^b   Thompson, Mark E ^b  

^a University of Southern California ^*  (United States)

^b UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL ENGINEERING; BIOSENSORS; DEPOSITION; ELECTRICAL ENGINEERING; ELECTRODES; MICROMACHINING; NATURAL FREQUENCIES; RESONATORS; SILICON NITRIDE; SPUTTERING; THIN FILMS; TISSUE; ZINC OXIDE;

BINDING SITES; FILM-BULK-ACOUSTIC SENSORS (FBAR); FREQUENCY SHIFT; QUARTZ CRYSTAL MICROBALANCE (QCM);

BIOCHEMISTRY;

EID: 3042825160     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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