Peristaltic PDMS pump with perfect dynamic valves for both gas and liquid

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 782-785

  Jeong, Ok Chan ^a   Morimoto, Takashi ^b   Watanabe, Yuusaku ^b   Konishi, Satoshi ^b  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DIAPHRAGMS; THICKNESS CONTROL; VALVES (MECHANICAL); VISCOSITY;

ACTUATOR DIAPHRAGM; DYNAMIC VALVES; MICRO CHANNEL; MICROPUMP; PERISTALTIC PUMP;

PUMPS;

EID: 33750120206     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. F. Goldschmidtboing, A Doll, M. Heinrichs, P. Woias, H-J Schrag, and U. T. Hopt, "A Generic Analytical Model for Microdiaphragm Pumps with Active Valves", J. Micromech. and Microeng., Vol. 15, pp. 673-683, 2005.
2. K. H. Kim, H. J. Yoon, O. C. Jeong, and S. S. Yang, "Fabrication and Test of a Microelectromagnetic Actuator", Sens. and Acts. A 117, pp. 8-16, 2005
3. W. Y. Sim, H. J. Yoon, O. C. Jeong, and S. S. Yang, "A Phase-change type Micropump with Aluminum Flap Valves", J. Micromech. and Microeng., Vol. 13, pp. 286-294, 2003.
4. O. C. Jeong, S. Kusuda, and S. Konishi, "All PDMS balloon actuators for bidirectional motion of micro finger", IEEE MEMS Conf., pp. 407-410, Jan. 2005.
5. O. C. Jeong, T. Yamamoto, S. W. Lee, T. Fujii, and S. Konishi, "Surface modification, mechanical property, and multi-layer bonding of PDMS and its application", Proc. micro TAS 2005, pp. 202-204, Oct. 2005.
6. P. R. Scheeper, W. Olthuis, and P. Bergveld, "The Design, Fabrication, and Testing of Corrugated Silicon Nitride Diaphragm", J. MEMS, Vol. 3, No. 1, pp. 36-42, 1994.