High tuning range parallel plate MEMS variable capacitors with arrays of supporting beams

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 666-669

  Bakri Kassem, M ^a   Mansour, R R ^a  

^a UNIVERSITY OF WATERLOO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC POTENTIAL; FORCE CONTROL; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; TUNING;

ARRAY CONFIGURATION; PLATE DEFLECTS; VARIABLE CAPACITORS;

CAPACITORS;

EID: 33750116327     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. Bakri-Kassem, M.; Mansour, R.R.;" Two movable plate nitride loaded MEMS variable capacitor " IEEE MTT Trans. Microwave Theory Tech. Vol. 52, No. 3, March 2004
2. Peroulis, D.; Katehi, L.P.B.; " Electrostatically - tunable analog RF MEMS varactors with measured capacitance range of 300% " Microwave Symposium Digest, 2003 IEEE MTT-S International, Volume: 3, 8-13 June 2003 Page(s): 1793-1796 vol.3
3. Faheem, F.F. ; Hoivik, N. D.; Lee, Y.C. ; Gupta, K.C.; "Post - enabled precision flip-chip assembly for variable MEMS capacitor" Microwave Symposium Digest, 2003 IEEE MTT-S International, Volume: 3,8-13 June 2003 Page(s): 1927-1930 vol.3
4. Bakri - Kassem, M. ; Mansour, R. R. " An Improved Design for Parallel Plate MEMS Variable Capacitors" IEEE MTT-S Int. Microwave Symposium Digest, Texas, USA, June 2004. pp. 865 - 868.
5. http://www.memscap.com
6. Microsystem Design book, Stephen. D. Senturia, Kluwer Accademic Publishers. Fourth Printing 2002
7. www.coventor.com
8. Aleksander Dec, and Ken Suyama, " Micromachined Electro - Mechanically Tunable Capacitors and Their Applications to RF IC's " IEEE Transactions on Microwave Theory and Techniques, Vol. 46, No. 12, p. 2587 December 1998.