TEM observation of tensile deformation of silicon nanowire between micromachined sharp opposing tips

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 879-882

  Ishida, Tadashi ^a   Kakushima, Kuniyuki ^a   Mita, Makoto ^b   Fujita, Hiroyuki ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CRYSTALLINE MATERIALS; CURRENT VOLTAGE CHARACTERISTICS; DEFORMATION; ELECTROSTATICS; SILICON; SINGLE CRYSTALS; TRANSMISSION ELECTRON MICROSCOPY;

ELECTROSTATIC MICROACTUATORS; MICROFABRICATION; SILICON NANOWIRES; TENSILE DEFORMATION;

NANOSTRUCTURED MATERIALS;

EID: 26844534595     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

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2. Y. Kondo, et al., "Synthesis and Characterization of Helical Multi-Shell Gold Nanowire", Sci, vol. 289, pp. 606-608, 2000
3. U. Gosele et al., "Self-propagating room-temperature silicon wafer bonding in ultrahigh vacuum", Appl. Phys. Lett. 67, 3614, 1995
4. C. J. Muller, et al., "Experimental observation of the transition from weak link to tunnel junction" Physica, 191C, 485, 1992
5. T. Kizuka, "Direct atomistic observation of a contact process between crystalline silicon surfaces at room temperature", Phys. Rev. B, vol. 63, pp. 033309, 2001