Vertical and horizontal parallel mounting of micro components on a substrate with high surface coverage

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 250-253

  Fang, Jiandong ^a   Böhringer, Karl F ^a  

^a University of Washington   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROPHILICITY; PATTERN RECOGNITION; SELF ASSEMBLY; SILICON; SUBSTRATES; VIBRATIONS (MECHANICAL);

AIR ENVIRONMENT; DICED SILICON PARTS; HIGH SURFACE COVERAGE; MICRO COMPONENTS;

MICROELECTROMECHANICAL DEVICES;

EID: 33750097204     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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