Development of 5-axis linear motor driven super-precision machine

CIRP Annals - Manufacturing Technology

Volumn 55, Issue 1, 2006, Pages 381-384

  Sriyotha, P ^a   Nakamoto, K ^b   Sugai, M ^b   Yamazaki, K ^c  

^a KING MONGKUT'S UNIVERSITY OF TECHNOLOGY THONBURI   (Thailand)

^b Sodick Future Technologies Co   (Japan)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Linear drive; Nano technology; Ultra precision

Indexed keywords

ALUMINA; CERAMIC MATERIALS; MACHINE DESIGN; NANOTECHNOLOGY; POWER AMPLIFIERS; PRECISION ENGINEERING;

LINEAR DRIVES; POSITIONING ACCURACY; ULTRA-PRECISION;

LINEAR MOTORS;

EID: 33750092281     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)60440-5     Document Type: Article

References (7)

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