Precision cutting processes for manufacturing of optical components

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4440, Issue , 2001, Pages 145-151

  Weck, Manfred ^a   Hennig, Jan ^a   Hilbing, Robert ^a  

^a FRAUNHOFER INSTITUTE FOR PRODUCTION TECHNOLOGY IPT   (Germany)

Author keywords

Diamond machining; Fast tool servo system; Micro structures; Non rotationally symmetric surface; Optical components; Ultra precision machining

Indexed keywords

ASPHERICS; DIAMOND CUTTING TOOLS; GRINDING (MACHINING); MICROOPTICS; MICROSTRUCTURE; OPTICAL DESIGN; POLISHING;

OPTICAL COMPONENTS; PRECISION CUTTING PROCESSES;

MICROMACHINING;

EID: 0035760310     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.448034     Document Type: Article

References (4)

1. S. Fischer, Fertigungssysteme zur spanenden Herstellung von Mikrostrukturen, RWTH Aachen, 2000
2. F. Klocke, M. Weck et al., "Ultraprezisionsbearbeitung und Fertigung von Mikrostrukturen", IDR 3/96, pp. 122-127, 1996
3. M. Weck, "Ultraprecision Machining of Micro Components", proceedings of the International Seminar on Precision Engineering and Micro Technology, pp. 113-122, July 2000
4. M. Weck, F. Klocke et al., "Manufacturing and Applications of Non-Rotationally Symmetric Optics", proceedings of SPIE Vol. 3739, pp. 94-107, 1999