Measurement and modeling of the bidirectional reflectance of SiO 2 coated Si surfaces

International Journal of Thermophysics

Volumn 27, Issue 3, 2006, Pages 820-839

  Lee, H J ^a   Zhang, Z M ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Bidirectional reflectance distribution function (BRDF); Radiative properties; Rough surfaces; Thin films

Indexed keywords

DIELECTRIC MATERIALS; GEOMETRICAL OPTICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFLECTION; SIGNAL TO NOISE RATIO; SILICA; THIN FILMS;

BIDIRECTIONAL REFLECTANCE DISTRIBUTION FUNCTION (BRDF); LASER SCATTEROMETERS; RADIATIVE PROPERTIES; SURFACE MICROSTRUCTURES;

SURFACE ROUGHNESS;

EID: 33750060321     PISSN: 0195928X     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10765-006-0055-0     Document Type: Article

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