A novel surface finishing technique for microparts using an optically controlled microparticle tool

CIRP Annals - Manufacturing Technology

Volumn 55, Issue 1, 2006, Pages 613-616

  Takaya, Y ^a   Hida, K ^a   Miyoshi, T ^a   Hayashi, T ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Micropart; Optical force; Surface finishing

Indexed keywords

METAL FINISHING; SILICON; SINGLE CRYSTALS; SURFACE PHENOMENA; SURFACE ROUGHNESS; WSI CIRCUITS;

MEAN SQUARE ROUGHNESS; MICROPARTICLE TOOL; OPTICAL FORCE; SURFACE FINISHING;

MICROMACHINING;

EID: 33750042594     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)60495-8     Document Type: Article

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