Poly(dimethylsiloxane)-based packaging technique for microchip fluorescence detection system applications

Journal of Microelectromechanical Systems

Volumn 15, Issue 5, 2006, Pages 1152-1158

  Kim, Young Hwan ^a,c   Shin, Kyeong Sik ^a   Kang, Ji Yoon ^a   Yang, Eun Gyeong ^a   Paek, Kyeong Kap ^b   Seo, Dae Shik ^c   Ju, Byeong Kwon ^d  

^a Korea Institute of Science and Technology   (South Korea)

^b Daejin University   (South Korea)

^c Yonsei University   (South Korea)

^d Korea University   (South Korea)

Author keywords

Finger type p i n photodiode; Interference filter; Microchannel; On chip; Organic light emitting diode (OLED); Poly(dimethylsiloxane) (PDMS) based packaging

Indexed keywords

INTERFERENCE FILTER; MICROCHANNEL; ORGANIC LIGHT-EMITTING DIODE; P-I-N PHOTODIODE;

EDGE DETECTION; FLUORESCENCE; LIGHT EMITTING DIODES; OPTICAL FILTERS; PHOTODIODES; SEMICONDUCTING SILICON; THIN FILMS;

PACKAGING;

EID: 33749992722     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.880355     Document Type: Article

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