Precise determination of the dielectric constant and thickness of a nanolayer by use of surface plasmon resonance sensing and multiexperiment linear data analysis

Applied Optics

Volumn 45, Issue 23, 2006, Pages 6038-6044

  Chyou, Jin Jung ^a   Chu, Chih Sheng ^a   Chien, Fan Ching ^a   Lin, Chun Yu ^b   Yeh, Tse Liang ^a   Hsu, Roy Chaoming ^c   Chen, Shean Jen ^b  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c NATIONAL CHIAYI UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DATA REDUCTION; ELLIPSOMETRY; POLYMERS; SCANNING ELECTRON MICROSCOPY; SURFACE PLASMON RESONANCE; THICKNESS MEASUREMENT;

METAL FILM; MOLECULAR IMPRINTING POLYMER; NANOLAYER;

PERMITTIVITY;

EID: 33749868005     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.006038     Document Type: Article

References (16)

1. B. Liedberg, C. Nylander, and I. Lundstrom, "Surface plasmon resonance for gas detection and biosensing," Sens. Actuators 4, 299-304 (1983).
2. H. Raether, Surface Plasmons on Smooth and Rough Surfaces and on Gratings (Springer-Verlag, 1988).
3. J. Homola, S. S. Yee, and G. Gauglitz, "Surface plasmon resonance sensors: review," Sens. Actuators B 54, 3-15 (1999).
4. J. M. Phelps and D. M. Taylor, "Determining the relative permittivity and thickness of a lossless dielectric overlayer on a metal film using optically excited surface plasmon polaritons," J. Phys. D 29, 1080-1087 (1996).
5. H. E. de Bruijn, B. S. F. Altenburg, R. P. H. Kooyman, and J. Grève, "Determination of thickness and dielectric constant of thin transparent dielectric layers using surface plasmon resonance," Opt. Commun. 82, 425-432 (1991).
6. F.-C. Chien and S.-J. Chen, "A sensitivity comparison of optical biosensors based on four different surface plasmon resonance modes," Biosens. Bioelectron. 20, 633-642 (2004).
7. K. A. Peterlinz and R. Georgiadis, "Two-color approach for determination of thickness and dielectric constant of thin films using surface plasmon resonance spectroscopy," Opt. Commun. 130, 260-266 (1996).
8. K. S. Johnston, S. R. Karlsen, C. C. Jung, and S. S. Yee, "New analytical technique for characterization of thin films using surface plasmon resonance," Mat. Chem. Phys. 42, 242-246 (1995).
9. T. M. Chinowsky and S. S. Yee, "Quantifying the information content of surface plasmon resonance reflection spectra," Sens. Actuators B 51, 321-330 (1998).
10. T. M. Chinowsky, L. S. Jung, and S. S. Yee, "Optimal linear data analysis for surface plasmon resonance biosensors," Sens. Actuators B 54, 89-97 (1999).
11. W. P. Chen and J. M. Chen, "Use of surface plasma waves for determination of the thickness and optical constants of thin metallic films," J. Opt. Soc. Am. 71, 189-191 (1981).
12. J.-J. Chyou, S.-J. Chen, C.-S. Chu, C.-H. Tsai, F.-C. Chien, G.-Y. Lin, K.-T. Huang, W.-C. Ku, S.-K. Chiu, and C.-M. Tzeng, "Multi-experiment linear data analysis for ATR biosensors," Proc. SPIE 4819, 175-184 (2002).
13. J.-J. Chyou, S.-J. Chen, C.-S. Chu, Z.-H. Shih, C.-Y. Lin, and C.-F. Shu, "Fabrication and metrology of E-O polymer light modulator based on waveguide-coupled surface plasmon resonance," Opt. Eng. 44, 034001 (2005).
14. U. Schroder, "The influence of thin metallic coatings on the dispersion of surface plasma-oscillations in gold-silver film systems," Surf. Sci. 102, 118-130 (1981).
15. J.-N. Yih, F.-C. Chien, C.-Y. Lin, H.-F. Yau, and S.-J. Chen, "An angular-interrogation attenuated-total-reflection metrology system for plasmonic sensors," Appl. Opt. 44, 6155-6162 (2005).
16. K. Taniwaki, A. Hyakutake, T. Aoki, M. Yoshikawa, M. D. Gruiver, and G. P. Robertson, "Evaluation of the recognition ability of molecularly imprinted materials by surface plasmon resonance (SPR) spectroscopy," Anal. Chim. Acta 489, 191-198 (2003).