Chemical bonding, permittivity and elastic properties in locally modified organosilicate glass

Materials Research Society Symposium Proceedings

Volumn 914, Issue , 2006, Pages 47-54

  Zschech, Ehrenfried ^a   Stegmann, Heiko ^b   Hoffmann, Patrick ^c   Schmeisser, Dieter ^c   Potapov, Pavel ^a   Engelmann, Hans Juergen ^a   Chumakov, Dmytro ^a   Geisler, Holm ^a  

^a IBM MICROELECTRONICS   (United States)

^b CARL ZEISS SMT AG   (Germany)

^c BRANDENBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; ELECTRON ENERGY LOSS SPECTROSCOPY; MECHANICAL PROPERTIES; PERMITTIVITY; POLARIZATION; STIFFNESS;

CHEMICAL BONDING; ELECTRONIC POLARIZABILITY; FORCE MODULATION (FM) MODE; NANOINDENTATION;

BOROSILICATE GLASS;

EID: 33749646521     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-0914-f11-03     Document Type: Conference Paper

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