Mechanical properties of low-k materials on the nanometer scale

AIP Conference Proceedings

Volumn 817, Issue , 2006, Pages 110-116

  Chumakov, D ^a   Geisler, H ^a   Jiang, L ^a   Zschech, E ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

Damage; Force modulation; Low k; Nanoindentation

Indexed keywords

EID: 33751258599     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2173539     Document Type: Conference Paper

References (6)

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3. L. Landau, E. Lifshitz: Teoreticheskaya Fizika, 1.7, Teoriya Uprugosti, Moscow: Nauka, 1987, pp. 44-50.
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5. L. Jiang, H. Geisler, E. Zschech, Materials Science Poland, 23, 643-651 (2005).
6. th International Workshop", AIP Conference Proceedings, this volume