Structures and properties of an ultra-low-k material: Classical-molecular- dynamics and first-principles calculations

Materials Research Society Symposium Proceedings

Volumn 914, Issue , 2006, Pages 21-26

  Ushio, Jiro ^a   Hamada, Tomoyuki ^b   Ohno, Takahisa ^a,b   Nakao, Shin Ichi ^c   Yoneda, Katsumi ^c   Kato, Manabu ^c   Kobayashi, Nobuyoshi ^c  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^c SEMICONDUCTOR LEADING EDGE TECHNOLOGIES INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; COMPUTER SIMULATION; HYDROGEN; MOLECULAR DYNAMICS; PROBABILITY DENSITY FUNCTION; SILICON; ULTRAVIOLET RADIATION;

HYDROGEN ATOMS; SILICON ATOMS; TRIAL STRUCTURES; ULTRA-LOW-K MATERIAL;

DIELECTRIC MATERIALS;

EID: 33749641013     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-0914-f03-02     Document Type: Conference Paper

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