First-principle molecular model of PECYD SiOCH film for the mechanical and dielectric property investigation

Proceedings of the IEEE 2005 International Interconnect Technology Conference, IITC

Volumn , Issue , 2005, Pages 66-68

  Tajima, N ^a   Hamada, T ^b   Ohno, T ^a   Yoneda, K ^c   Kobayashi, N ^c   Hasaka, T ^d   Inoue, M ^d  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^c SEMICONDUCTOR LEADING EDGE TECHNOLOGIES INC   (Japan)

^d TAIYO NIPPON SANSO CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; DIELECTRIC PROPERTIES; ELASTIC MODULI; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYMERS; SILICON COMPOUNDS;

ATOMIC COORDINATES; FILM STRUCTURES; MOLECULAR MODELS;

THIN FILMS;

EID: 28244478416     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

1. C. -H. Jan et al., Proc. IEEE IITC, 205 (2004).
2. H. J. C. Berendsen, J. P. M. Postma, W. F. van Gunsteren, A. DiNola, and J. R. Haak, J. Chem. Phys., 81, 3684 (1984).
3. M. ONeill, et.al., Semiconductor International, 2002.
4. N. L. Allinger, Y. H. Yuh, and J.-H. Lii, J. Am. Chem. Soc., 111, 8551 (1989).
5. J.-H. Lii and N. L. Allinger, J. Am. Chem. Soc., 111, 8566 (1989).
6. J.-H. Lii, and N. L. Allinger, J. Am. Chem. Soc., 111, 8576 (1989).
7. G. Harbeke "Optical Properties of Semiconductors", in Optical Prop of Solids, F. Abeles, Ed., Amsterdam, North-Holland, pp.21-92 (1972).
8. R. D. King-Smith, D. Vanderbilt, Phys. Rev., B47, 161 (1993).
9. R. Resta, Rev. Mod. Phys., 66, 899-915 (1994).
10. J. P. Perdew, K. Burke, and M. Ernzerhof, Phys. Rev. Lett., 77, 3865 (1996).
11. J. P. Perdew, K. Burke, and M. Ernzerhof, Phys. Rev. Lett., 78, 1396 (1997).
12. A. Grill, L. perrand, V. Patel, C. Jahnes, and S. Cohen, Mater. Res. Soc. Symp. Proc., 565, 107 (1999).
13. Phase: Institute of Industrial Science, University of Tokyo, Tokyo, 2004.
14. K. Misawa et al., Extended Abstracts SSDM, 256 (2003).