Efficient numerical representation of the optical field for the propagation of partially coherent radiation with a specified spatial and temporal coherence function

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 23, Issue 7, 2006, Pages 1616-1625

  Rydberg, Christer ^a   Bengtsson, Jörgen ^b  

^a Micronic Laser Systems AB   (Sweden)

^b CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT PROPAGATION; NUMERICAL METHODS; OPTICAL VARIABLES MEASUREMENT; STATISTICAL OPTICS;

COHERENCE FUNCTION; PARTIALLY COHERENT LIGHT; PARTIALLY COHERENT RADIATION; SPATIAL COHERENCE; TEMPORAL COHERENCE;

COHERENT LIGHT;

EID: 33749598827     PISSN: 10847529     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAA.23.001616     Document Type: Article

References (20)

1. H. Martinsson, T. Sandstrom, A. Bleeker, and J. D. Hintersteiner, "Current status of optical maskless lithography," J. Microlithogr. Microfabr. Microsyst. 4, 1-15 (2005).
2. Y. Granik, "Illuminator optimization methods in microlithography," in Proc. SPIE 5524, 217-229 (2004).
3. P. Michaloski, "Requirements and designs of illuminators for microlithography," in Proc. SPIE 5525, 1-10 (2004).
4. J. W. Goodman, Statistical Optics (Wiley, 2000).
5. L. Mandel and E. Wolf, Optical Coherence and Quantum Optics (Cambridge U. Press, 1995).
6. M. J. Bastiaans, "Application of the Wigner distribution function to partially coherent light," in Proc. SPIE 3729, 114-128 (1999).
7. H. Gross, "Numerical propagation of partially coherent laser beams," Opt. Laser Technol. 29, 257-260 (1997).
8. J. W. Goodman, Introduction to Fourier Optics (McGraw-Hill, 1996).
9. Q. Lin and Y. Cai, "Fractional Fourier transform for partially coherent Gaussian Schell-model beams," Opt. Lett. 27, 1672-1674 (2002).
10. A. Thaning, A. T. Friberg, and Z. Jaroszewicz, "Synthesis of diffractive axicons for partially coherent light based on asymptotic wave theory," Opt. Lett. 26, 1648-1650 (2001).
11. S. Y. Popov and A. T. Friberg, "Design of diffractive axicons for partially coherent light," Opt. Lett. 23, 1639-1641 (1998).
12. E. Wolf, "New theory of partial coherence in the space-frequency domain. Part I: Spectra and cross-spectra of steady-state sources," J. Opt. Soc. Am. 72, 343-351 (1982).
13. E. Wolf, "New theory of partial coherence in the space-frequency domain. Part II: Steady-state fields and higher-order correlations," J. Opt. Soc. Am. A 3, 76-85 (1986).
14. Y. Lin and J. Buck, "Numerical modeling of the excimer beam," in Proc. SPIE 3677, 700-710 (1999).
15. B. Eppich, G. Mann, and H. Weber, "Spatial coherence: comparison of interferometric and non-interferometric measurements," in Proc. SPIE 4969, 137-148 (2003).
16. B. L. Anderson and P. L. Fuhr, "Twin-fiber interferometric method for measuring spatial coherence," Opt. Eng. 32, 926-932 (1993).
17. P. De Santis, F. Gori, G. Guattari, and C. Palma, "Synthesis of partially coherent fields," J. Opt. Soc. Am. A 3, 1258-1262 (1986).
18. A. T. Friberg, E. Tervonen, and J. Turunen, "Interpretation and experimental demonstration of twisted Gaussian Schell-model beams," J. Opt. Soc. Am. A 11, 1818-1825 (1994).
19. B. J. Thompson and E. Wolf, "Two-beam interference with partially coherent light," J. Opt. Soc. Am. 47, 895-902 (1957).
20. X. Deng, B. Bihari, J. Gan, F. Zhao, and R. T. Chen, "Fast algorithm for chirp transforms with zooming-in ability and its applications," J. Opt. Soc. Am. A 17, 762-771 (2000).