|
Volumn 3677, Issue II, 1999, Pages 700-710
|
Numerical modeling of the excimer beam
a a |
Author keywords
[No Author keywords available]
|
Indexed keywords
ERROR ANALYSIS;
EXCIMER LASERS;
LASER BEAMS;
LIGHT PROPAGATION;
MATHEMATICAL MODELS;
SPECKLE;
STATISTICAL METHODS;
WAVEFRONTS;
EXCIMER BEAMS;
PHOTOLITHOGRAPHY;
|
EID: 0032686714
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.350856 Document Type: Conference Paper |
Times cited : (6)
|
References (17)
|