-
3
-
-
0002193058
-
Me-chanical characterization of thick polysilicon films: Young's modulus and fracture strength evaluated with microstructures
-
Greek, S., Ericson, F., Johansson, S., Furtsch, M., and Rump, A., 1999, "Me-chanical Characterization of Thick Polysilicon Films: Young's Modulus and Fracture Strength Evaluated with Microstructures," J. Micromech. Microeng., 9, pp. 245-151.
-
(1999)
J. Micromech. Microeng.
, vol.9
, pp. 245-1151
-
-
Greek, S.1
Ericson, F.2
Johansson, S.3
Furtsch, M.4
Rump, A.5
-
4
-
-
0033343023
-
Statistical characterization of fracture of brittle MEMS materials
-
Soc. Of Photo-Optical Instr. Eng., Bellingham WA
-
Jones, P. T., Johnson, G. C., and Howe, R. T., 1999, "Statistical Characterization of Fracture of Brittle MEMS Materials," Proceedings MEMS Reliability for Critical and Space Applications, Soc. Of Photo-Optical Instr. Eng., Bellingham WA. pp. 20-29.
-
(1999)
Proceedings MEMS Reliability for Critical and Space Applications
, pp. 20-29
-
-
Jones, P.T.1
Johnson, G.C.2
Howe, R.T.3
-
5
-
-
0030704418
-
Measurements of young modulus, poisson ratio and tensile strength of polysilicon
-
IEEE. Piscataway, NJ
-
Sharpe, W. N., Yuan, B., Vaidynathan, R., and Edwards, R., 1997, "Measurements of Young Modulus, Poisson Ratio and Tensile Strength of Polysilicon," Proceedings of the 10th IEEE International Workshop on Microelectrome-chanical Systems, IEEE. Piscataway, NJ. pp. 424-429.
-
(1997)
Proceedings of the 10th IEEE International Workshop on Microelectrome-chanical Systems
, pp. 424-429
-
-
Sharpe, W.N.1
Yuan, B.2
Vaidynathan, R.3
Edwards, R.4
-
6
-
-
0033425931
-
The mechanical properties of thin polycrystalline silicon films as function of deposition and doping conditions
-
Elbrecht, L., and Binder, J., 1999. "The Mechanical Properties of Thin Polycrystalline Silicon Films as Function of Deposition and Doping Conditions," Sens. Mater., 11(3), pp. 163-179.
-
(1999)
Sens. Mater.
, vol.11
, Issue.3
, pp. 163-179
-
-
Elbrecht, L.1
Binder, J.2
-
7
-
-
0034468211
-
Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM
-
Namazu, T., Isono, Y., and Tanaka, T., 2000, "Evaluation of Size Effect on Mechanical Properties of Single Crystal Silicon by Nanoscale Bending Test Using AFM," J. Micromechanical Syst., 9(4), pp. 450-459.
-
(2000)
J. Micromechanical Syst.
, vol.9
, Issue.4
, pp. 450-459
-
-
Namazu, T.1
Isono, Y.2
Tanaka, T.3
-
8
-
-
0037403904
-
Strength reliability of statistical heterogeneous microbeams
-
Altus, E., and Givli, S., 2003, "Strength Reliability of Statistical Heterogeneous Microbeams," Int. J. Solids Struct., 40(9), pp. 2069-2083.
-
(2003)
Int. J. Solids Struct.
, vol.40
, Issue.9
, pp. 2069-2083
-
-
Altus, E.1
Givli, S.2
-
9
-
-
0142104258
-
Effect of modulus-strength correlation on the reliability of randomly heterogeneous beams
-
Givli, S., and Altus, E., 2003, "Effect of Modulus-Strength Correlation on the Reliability of Randomly Heterogeneous Beams," Int. J. Solids Struct., 40(24), pp. 6703-6722.
-
(2003)
Int. J. Solids Struct.
, vol.40
, Issue.24
, pp. 6703-6722
-
-
Givli, S.1
Altus, E.2
-
10
-
-
12344308263
-
Fracture of brittle microbeams
-
Ostoja-Starzewski, M., 2004, "Fracture of Brittle Microbeams," J. Appl. Mech., 71, pp. 424-427.
-
(2004)
J. Appl. Mech.
, vol.71
, pp. 424-427
-
-
Ostoja-Starzewski, M.1
-
11
-
-
33749575950
-
A novel test device for measuring the strength of microbeams
-
to be published
-
Elata, D., and Hirshberg, A., 2005, "A Novel Test Device for Measuring the Strength of Microbeams," J. Microelectromech. Syst., (to be published).
-
(2005)
J. Microelectromech. Syst.
-
-
Elata, D.1
Hirshberg, A.2
-
12
-
-
84987266075
-
A statistical distribution function of wide applicability
-
Weibull, W., 1951, "A Statistical Distribution Function of Wide Applicability," J. Appl. Mech., 18(3), pp. 293-297.
-
(1951)
J. Appl. Mech.
, vol.18
, Issue.3
, pp. 293-297
-
-
Weibull, W.1
-
13
-
-
0033352518
-
The effects of heterogeneity and anisotropy on the size effect in cracked polycrystalline films
-
Ballarini. R., Mullen, R. L., and Heuer, A. H., 1999, "The Effects of Heterogeneity and Anisotropy on the Size Effect in Cracked Polycrystalline Films," Int. J. Fract., 95, pp. 19-39.
-
(1999)
Int. J. Fract.
, vol.95
, pp. 19-39
-
-
Ballarini, R.1
Mullen, R.L.2
Heuer, A.H.3
|