Powerful tools for thermal characterisation of MEMS

Sensors and Actuators, B: Chemical

Volumn 120, Issue 1, 2006, Pages 270-277

  Furjes P ^a   Bognar Gy ^b   Barsony I ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

Author keywords

Microheater; Thermal modelling and characterisation

Indexed keywords

CHEMICAL SENSORS; FINITE ELEMENT METHOD; MICROMACHINING; THERMOANALYSIS; THERMODYNAMIC PROPERTIES; THERMOGRAPHY (IMAGING);

MICROHEATERS; THERMAL ENGINEERING; THERMAL MODELING; THERMOGRAPHY SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 33749371259     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.02.041     Document Type: Article

References (13)

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