Lock-in IR-thermography - A novel tool for material and device characterization

Solid State Phenomena

Volumn 82-84, Issue , 2002, Pages 741-746

  Huth, S ^a   Breitenstein, O ^a   Huber, A ^a   Dantz, D ^a   Lambert, U ^a   Altmann, F ^a  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

Defect imaging; GOI defects; IC testing; Thermography

Indexed keywords

LIQUID CRYSTALS; LUMINESCENCE; MOS DEVICES; NONDESTRUCTIVE EXAMINATION; THERMOGRAPHY (TEMPERATURE MEASUREMENT);

DEFECT IMAGING; INFRARED THERMOGRAPHY;

DEFECTS;

EID: 17344390067     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (11)