Fracture toughness evaluated by indentation methods and its relation to surface energy in silicon single crystals

Materials Transactions

Volumn 44, Issue 4, 2003, Pages 681-684

  Tanaka, Masaki ^a   Higashida, Kenji ^a   Nakashima, Hideharu ^a   Takagi, Hidenari ^b   Fujiwara, Masami ^b  

^a KYUSHU UNIVERSITY   (Japan)

^b NIHON UNIVERSITY   (Japan)

Author keywords

Crack; Indentation fracture method; Molecular dynamics; Vickers indentation

Indexed keywords

CALCULATIONS; CRACKS; CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; FRACTURE TOUGHNESS; INDENTATION; INTERFACIAL ENERGY; MOLECULAR DYNAMICS; SINGLE CRYSTALS; VICKERS HARDNESS TESTING;

CONICAL INDENTER; CRYSTALLOGRAPHIC PLANES; INDENTATION FRACTURE; INDENTATION FRACTURE METHOD; VICKERS INDENTATION;

SILICON WAFERS;

EID: 0037529440     PISSN: 13459678     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans.44.681     Document Type: Article

References (23)

1. W. Lang: Mater. Sci. Eng. R17 (1996) 1-55.
2. M. Esashi: Vacuum 47 (1996) 469-474.
3. A. E. Carlsson and R. Thomson: Solid State Physics. Ed. by H. Ehrenreich and F. Spaepen. Vol. 51 (Academic Press, 1997) pp. 233-280.
4. C. P. Chen and M. H. Leipold: Am. Ceram. Soc. Bull. 59 (1980) 469-472.
5. K. Hayashi, S. Tsujimoto, Y. Okamoto and T. Nishikawa: J. Soc. Mater. Sci. Japan 40 (1991) 405-410.
6. M. Kishi and Y. Miura: Int. Sym. Designing Processing and Properties of Adv. Eng. Mater., (JSPS AEM 156 committee, 1997) pp. 397-402.
7. F. Ebrahimi and L. Kalwani: Mater. Sci. Eng. A268 (1999) 116-126.
8. M. Fujiwara: J. Japan Inst. Light Met. 52 (2002) 282-290.
9. B. R. Lawn and T. R. Wilshaw: J. Mater. Sci. 10 (1975) 1049-1081.
10. B. R. Lawn, A. G. Evans and D. B. Marshall: J. Am. Ceram. Soc. 63 (1980) 574-581.
11. G. R. Anstis, P. Chantikul, B. R. Lawn and D. B. Marshall: J. Am. Ceram. Soc. 64 (1981) 533-538.
12. S. S. Chiang, D. B. Marshall and A. G. Evans: J. Appl. Phy. 53 (1982) 298-311.
13. K. Niihara: J. Mater. Sci. Let. 2 (1983) 221-223.
14. K. Tanaka, Y. Kitahara, Y. Ichinose and T. Iimura: Acta. Metall. 32 (1984) 1719-1729.
15. K. Tanaka: J. Mater. Sci. 22 (1987) 1501-1508.
16. J. Tersoff: Phys. Rev. B 39(8) (1989) 5566-5568.
17. K. Higashida, N. Narita, M. Tanaka, T. Morikawa, Y. Miura and R. Onodera: Philos. Mag. A 82 (2002) 3263-3273.
18. R. F. Cook and G. M. Pharr: J. Am. Ceram. Soc. 73 (1990) 787-817.
19. A. A. Griffith: Philos. Trans. R. Soc. London Ser. A 221 (1920) 163-198.
20. A. Kelly and N. H. Macmillan: Strong Solids, 3rd edn., (Oxford Science, Oxford, 1986) pp. 382-403.
21. J. P. Hirth and J. Lothe: Theory of Dislocations 2nd Ed., (Krieger Publishing Company Malabar, Florida, 1992) pp. 836-837.
22. R. W. Davidge: Mechanical behaviour of ceramics, (Cambridge University Press, Cambridge, 1979) p. 32.
23. J. J. Gliman: Fracture, Ed. by B. L. Averbach, D. K. Felbeck, G. T. Hahn and D. A. Thomas, (The Technology Press of Massachusetts Institute of Technology, 1959) pp. 204-205.