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Volumn , Issue , 2005, Pages 431-435

A new method of electrostatic force modeling for MEMS sensors and actuators

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC FIELD EFFECTS; FINITE ELEMENT METHOD; MICROACTUATORS; MICROSENSORS; VLSI CIRCUITS;

EID: 33749073371     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2005.16     Document Type: Conference Paper
Times cited : (6)

References (10)
  • 2
    • 0030234258 scopus 로고    scopus 로고
    • Electrostatic forces and their effects on capacitive mechanical Sensors
    • Sept.
    • R. Puers and D. Lapadatu," Electrostatic Forces and their effects on capacitive mechanical Sensors," Sensors and Actuators A, Vol. 56, No. 3, pp. 203-210, Sept. 1996.
    • (1996) Sensors and Actuators A , vol.56 , Issue.3 , pp. 203-210
    • Puers, R.1    Lapadatu, D.2
  • 3
    • 0041886902 scopus 로고    scopus 로고
    • High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps
    • Aug.
    • S. Pourkamali, A. Hashimura, R. Abdolvand, G. K. Ho, A. Erbil, and F. Ayazi, "High-Q Single Crystal Silicon HARPSS Capacitive Beam Resonators with Self-Aligned Sub-100-nm Transduction Gaps," Journal of Microelectromechanical Systems, Vol. 12, No. 4, pp. 487-496, Aug. 2003.
    • (2003) Journal of Microelectromechanical Systems , vol.12 , Issue.4 , pp. 487-496
    • Pourkamali, S.1    Hashimura, A.2    Abdolvand, R.3    Ho, G.K.4    Erbil, A.5    Ayazi, F.6
  • 4
    • 0038441780 scopus 로고    scopus 로고
    • Performance and reliability of post-CMOS metal/oxide MEMS for RF application
    • Jul.
    • M. Hill, C. O'Mahony, R. Duane, and A. Mathewson, "Performance and reliability of post-CMOS metal/oxide MEMS for RF application," Journal of Micromechanics and Microengineering, Vol. 13, No. 4, pp. 131-138, Jul. 2003.
    • (2003) Journal of Micromechanics and Microengineering , vol.13 , Issue.4 , pp. 131-138
    • Hill, M.1    O'Mahony, C.2    Duane, R.3    Mathewson, A.4
  • 7
    • 0021449264 scopus 로고
    • VLSI circuit reconstruction from mask topology
    • N. P. Van Der Meijs, and J. T. Fokkema, "VLSI Circuit Reconstruction from Mask Topology," Integration, Vol. 2, No. 2, pp. 85-119, 1984.
    • (1984) Integration , vol.2 , Issue.2 , pp. 85-119
    • Van Der Meijs, N.P.1    Fokkema, J.T.2
  • 9
    • 0003532560 scopus 로고    scopus 로고
    • Kluwer Academic Publishers, Boston
    • S. D. Senturia, "Microsystems Design", Kluwer Academic Publishers, Boston: 2000, pp. 130-137, 249-259, 544-558.
    • (2000) Microsystems Design , pp. 130-137
    • Senturia, S.D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.