Tunable microcavity based on inp-air bragg mirrors

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 5, Issue 1, 1999, Pages 111-114

  Le Dantec, R ^a   Benyattou, T ^a   Guillot, G ^a   Spisser, A ^b   Seassal, C ^b   Leclercq, J L ^c   Viktorovitch, P ^c   Rondi, D ^c   Blondeau, R ^c  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

^b ECOLE CENTRALE DE LYON   (France)

^c THALES   (France)

Author keywords

Fabry perot resonators; Indium compounds; Micromachining; Tunable filters; Wavelength division multiplexing

Indexed keywords

AIR; CAVITY RESONATORS; MICROMACHINING; MIRRORS; OPTICAL PROPERTIES; SEMICONDUCTING INDIUM PHOSPHIDE; TUNING; WAVELENGTH DIVISION MULTIPLEXING;

BRAGG MIRRORS; FABRY-PEROT RESONATORS; FULL WIDTH AT HALF MAXIMUM (FWHM);

OPTICAL FILTERS;

EID: 0032672608     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.748113     Document Type: Article

References (10)

1. M. C. Larson, B. Pezeshki, and J. S. Harris, "Vertical coupled-cavity microinterferometer on GaAs with deformable-menbrane top mirror," IEEE Photon. Technol. Lett., vol. 7, pp. 382-384, 1995.
2. E. C. Vail, M. S. Wu, G. S. Li, L. Eng, and C. J. Chang-Hasnain, "GaAs micromachined widely tunable Fabry-Perot filters," Electron. Lett., vol. 31, no. 3, pp. 228-229, 1995.
3. M. Y. Li, W. Yuen, G. S. Li, and C. J. Chang-Hasnain, "Top emitting micromechanical VCSEL with a 31.6 nm tuning range," IEEE Photon. Technol. Lett., vol. 10, pp. 18-20, 1998.
4. x deformable mirrors," IEEE Photon. Technol. Lett., vol. 10, pp. 394-396, 1998.
5. G. L. Christenson, A. T. T. D. Tran, Z. H. Zhu, Y. H. Lo, M. Hong, J. P. Mannaerts, and R. Bhat, "Long-wavelength resonant vertical-cavity LED/photodetector with a 75 nm tuning range," IEEE Photon. Technol. Lett., vol. 9, pp. 725-727, 1997.
6. N. Chitica, K. Streubel, and J. Andre, "Tunable monolithic Fabry-Perot filter manufactured by selective etching of InGaAs/InP epitaxial films," in IPRM Conf., Cape Cod, MA, May 11-15, 1997, pp. 115-117.
7. R. Riemenschneider, J. Peerling, J. Pfeiffer, A. Dehe, A. Vogt, P. Meibner, H. L. Hartnagel, N. Chitica, J. Daleiden, K. Streubel, H. Kunzel, and W. Gortz, "Mechanical-optical analysis of InP-based Bragg membranes for selective tunable WDM receivers," in Proc. SPIE, San Jose, CA, Jan. 1998, pp. 24-30.
8. C. Seassal, J. L. Leclercq, and P. Vicktorovitch, "Fabrication of InP based freestanding microstructures by selective surface micromachining," J. Micromech. Microeng., vol. 6, pp. 261-265, 1996.
9. A. Spisser, R. Le Dantec, C. Seassal, J. L. Leclercq, T. Benyattou, D. Rondi, R. Blondeau, G. Guillot, and P. Viktorovitch, "Highly selective and widely tunable 1.55 μm InP/Air-gap micromachined Fabry-Perot filter for optical communications," IEEE Photon. Technol. Lett., to be published.
10. A. E. Siegman, "Unstable resonators for lasers applications," Proc. IEEE, vol. 53, pp. 277, 1965.