New design for surface micromachined bistable and multistable switches

Journal of Microlithography, Microfabrication and Microsystems

Volumn 2, Issue 4, 2003, Pages 255-258

  Foulds, Ian G ^a   Trinh, Maria T ^a   Hu, Sam ^a   Liao, Steven W ^a   Johnstone, Robert W ^a   Parameswaran, M Ash ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

Bistable; MEMS; Multi stable; Optics; Relay; Surface micromachine; Switch

Indexed keywords

EID: 33749066741     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1610476     Document Type: Article

References (11)

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