Light optical deformation measurements in microbars with nanometer resolution

Microsystem Technologies

Volumn 2, Issue 2, 1996, Pages 83-91

  Mazza, E ^a   Danuser, G ^a   Dual, J ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2542532964     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/bf02447756     Document Type: Article

References (20)

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