Adhesion and friction studies of silicon surfaces processed using a microparticle-based method

Tribology Letters

Volumn 23, Issue 1, 2006, Pages 1-5

  Zhang, Yile ^a   Sundararajan, Sriram ^a  

^a Iowa State University of Science and Technology   (United States)

Author keywords

Adhesion; Friction reducing; Roughness effects; Surface modification

Indexed keywords

ADHESION; DRY ETCHING; ELECTROSTATICS; FRICTION; SURFACE PHENOMENA; SURFACE ROUGHNESS; SURFACE TREATMENT;

FRICTION-REDUCING; MICROPARTICLE-BASED METHOD; ROUGHNESS EFFECTS; SIZE EFFECT;

SILICON;

ADHESION; DRY ETCHING; ELECTROSTATICS; FRICTION; SILICON; SURFACE PHENOMENA; SURFACE ROUGHNESS; SURFACE TREATMENT;

EID: 33748988208     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-006-9096-6     Document Type: Article

References (31)

1. Bhushan B., (ed). 1997 Tribology Issues and Opportunities in MEMS Kluwer Academic Publishers Norwell, MA
2. Madou M.J., 2002 Fundamentals of Microfabrication 2nd edn. CRC Press Boca Raton, Florida
3. Maboudian R., Howe R.T., (1997) Tribol. Lett. 3: 215
4. Kennedy F.E., Lidhagen D., Erdemir A., Woodford J.B., Kato T., (2003) Wear 255: 854
5. Maboudian R., Ashurst W.R., Carraro C., (2000) Sens. Actuators A Phys. 82: 219
6. Zhang Y., Sundararajan S., (2005) J. Appl. Phys. 97: 10,356
7. Whitehouse D.J., Archard J.F., (1970) Proc. R. Soc. Lond. Ser. A, Math. Phys. Sci. 316: 97
8. Greenwood J.A., Williamson J.B.P., (1966) Proc. R. Soc. Lond. Ser. A, Math. Phys. Sci. 295: 300
9. Persson B.N.J., (2001) Phys. Rev. Lett. 87: 116,101
10. Lee C.-C., Hsu W., (2003) J. Vac. Sci. Technol. B: Microelectron. Nanometer Struct. 21: 1505
11. Kovalchenko A., Ajayi O., Erdemir A., Fenske G., Etsion I., (2005) Tribol. Int. 38: 219
12. Deckman H.W., Dunsmuir J.H., (1982) Appl. Phys. Lett. 41: 377
13. Iler R.K., (1966) J. Colloid Interface Sci. 21: 569
14. Y. Zhang and S. Sundararajan, Appl. Phys. Lett. 88 (2006) 141,903
15. Check J., Karuppiah K.S.K., Sundararajan S., (2005) J. Biomed. Mater. Res. Part A 74A: 687
16. Johnson K., (1995) Wear 190: 162
17. Matsuoka Y., Yamamoto Y., Yamada K., Shimada S., Tanabe M., Yasukawa A., Matsuzaka H., (1995) J. Micromech. Microeng. 5: 25
18. Persson B.N.J., (2001) J. Chem. Phys. 115: 3840
19. Ruths M., Granick S., (1998) Langmuir 14: 1804
20. Fuller K.N.G., Tabor D., (1975) Proc. R. Soc. Lond. Ser. A, Math. Phys. Sci. 345: 327
21. Israelachvili J.N., (1991) Intermolecular & Surface Forces 2nd edn. Elsevier Academic Press San Diego
22. Johnson K.L., Kendall K., Roberts A.D., (1971) Proc. R. Soc. Lond. Ser. A, Math. Phys. Sci. 324: 301
23. Zhao Y., Tong T., Delzeit L., Kashani A., Meyyappan M., Majumdar A., (2006) J. Vac. Sci. Technol. B 24: 331
24. Lin Y.Y., Hui C.Y., Baney J.M., (1999) J. Phys. D 32: 2250
25. Perutz S., Kramer E.J., Baney J., Hui C.Y., Cohen C., (1998) J. Polym. Sci. B 36: 2129
26. Coefficient of Friction - Santoprene Thermoplastic Vulcanizate Versus Steel, Aluminum and Polypropylene. Manufacturer's specifications
27. Persson B.N.J., (1998) Surface Sci. 401: 445
28. Ronsin O., Coeyrehourcq K.L., (2001) Proc. R. Soc. Lond. Ser. A, Math. Phys. Sci. 457: 1277
29. Archard J.F., (1957) Proc. R. Soc. Lond. Ser. A, Math. Phys. Sci. 243: 190
30. Briscoe B.J., Tabor D., (1978) J. Adhes. 9: 145
31. Gracias D.H., Somorjai G.A., (1998) Macromolecules 31: 1269