Fabrication of patterned single-crystal SrTiO 3 thin films by ion slicing and anodic bonding

Applied Physics Letters

Volumn 89, Issue 12, 2006, Pages

  Lee, Yoo Seung ^a   Djukic, Djordje ^a   Roth, Ryan M ^a   Laibowitz, Robert ^a   Izuhara, Tomoyuki ^a   Osgood Jr , Richard M ^a   Bakhru, Sasha ^b   Bakhru, Hassaram ^b   Si, Weidong ^c   Welch, David ^c  

^a Department of Earth and Environmental Sciences   (United States)

^b STATE UNIVERSITY OF NEW YORK   (United States)

^c BROOKHAVEN NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC BONDING; ION SLICING; PYREX; STRONTIUM TITANATE (SRTIO3);

CRYSTAL STRUCTURE; DIELECTRIC PROPERTIES; HYDROGEN; ION IMPLANTATION; SILICON; SINGLE CRYSTALS; STRONTIUM COMPOUNDS; TITANIUM COMPOUNDS;

THIN FILMS;

EID: 33748961691     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2355457     Document Type: Article

References (22)

1. W. Hofman, S. Hoffmann, and R. Waser, Thin Solid Films 305, 66 (1997).
2. O. G. Vendik, Proceedings of the Fifth International Kharkov Symposium on Physics and Engineering of Microwaves, Millimeter and Submillimeter Waves, MSMW 04 (2004), Vol. 1, p. 66.
3. Yu. A. Boikov and T. Claeson, J. Appl. Phys. 81, 3232 (1997).
4. C. H. Mueller, R. E. Treece, T. V. Rivkin, F. A. Miranda, H. R. Moutinho, A. Swartzlander-Franz, M. Dalberth, and C. T. Rogers, IEEE Trans. Appl. Supercond. 7, 3512 (1997).
5. A. T. Findikoglu, Q. X. Jia, I. H. Campbell, X. D. Wu, D. W. Reagor, C. B. Mombourquette, and D. McMurry, Appl. Phys. Lett. 66, 3674 (1995).
6. M. Levy, R. M. Osgood, Jr., R. Liu, L. E. Cross, G. S. Cargill III, A. Kumar, and H. Bakhra, Appl. Phys. Lett. 73, 2293 (1998).
7. T. Izuhara, M. Levy, and R. M. Osgood, Jr., Appl. Phys. Lett. 76, 1261 (2000).
8. M. Levy, R. M. Osgood, Jr., A. S. Bhalla, R. Guo, L. E. Cross, A. Kumar, S. Sankaran, and H. Bakhru, Appl. Phys. Lett. 77, 2124 (2000).
9. T. Izuhara, R. M. Osgood, Jr., M. Levy, M. E. Reeves, Y. G. Wang, A. N. Roy, and H. Bakhra, Appl. Phys. Lett. 80, 1046 (2002).
10. T. Izuhara, I. L. Gheorma, R. M. Osgood, Jr., A. N. Roy, H. Bakhru, Y. M. Tesfu, and M. E. Reeves, Appl. Phys. Lett. 82, 616 (2003).
11. P. Rabiei and P. Gunter, Appl. Phys. Lett. 85, 4603 (2004).
12. P. Rabiei and W. H. Steier, Appl. Phys. Lett. 86, 161115 (2005).
13. F. J. Kub, K. D. Hobart, J. M. Pond, and S. W. Kirchoefer, Electron. Lett. 35, 477 (1999).
14. J. D. Baniecki, R. B. Laibowitz, T. M. Shaw, P. R. Duncombe, D. A. Neumayer, D. E. Kotecki, H. Shen, and Q. Y. Ma, Appl. Phys. Lett. 72, 498 (1998).
15. E. Suhir, J. Appl. Mech. 53, 657 (1986).
16. S. A. Wainwright, W. D. Biggs, J. D. Currey, and J. M. Gosline, Mechanical Design in Organisms (Princeton University Press, Princeton, NJ, 1982), p. 18.
17. A. Cozma and B. Puers, J. Micromech. Microeng. 5, 98 (1995).
18. M. Nese and A. Hanneborg, Sens. Actuators, A 37, 61 (1993).
19. C. M. Varma, Appl. Phys. Lett. 71, 3519 (1997).
20. S. S. Gevorgian, T. Martinsson, P. L. J. Linner, and E. L. Kollberg, IEEE Trans. Microwave Theory Tech. 44, 896 (1996).
21. T. Diepold and E. Obermeier, J. Micromech. Microeng. 6, 29 (1996).
22. W. B. Choi, B. K. Ju, Y. H. Lee, J. W. Jeong, M. R. Haskard, N. Y. Lee, M. Y. Sung, and M. H. Oh, J. Micromech. Microeng. 7, 316 (1997).