Formation of β-SiC nanowires by annealing SiC films in hydrogen atmosphere

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 35, Issue 1, 2006, Pages 146-150

  Yang, Li ^a   Zhang, Xing ^a   Huang, Ru ^a   Zhang, Guoyan ^a   Xue, Chengshan ^b  

^a PEKING UNIVERSITY   (China)

^b SHANDONG NORMAL UNIVERSITY   (China)

Author keywords

SiC; Annealing; Nanowires; Radio frequency magnetron sputtering; Thin films

Indexed keywords

ANNEALING; ELECTRIC WIRE; HYDROGEN; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; POLYCRYSTALLINE MATERIALS; SURFACE PROPERTIES; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

HYDROGEN ATMOSPHERE; NANOWIRES; RADIO FREQUENCY MAGNETRON SPUTTERING;

SILICON CARBIDE;

EID: 33748937729     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physe.2006.07.037     Document Type: Article

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