A survey of micro-actuator technologies for future spacecraft missions

JBIS - Journal of the British Interplanetary Society

Volumn 49, Issue 4, 1996, Pages 129-138

  Gilbertson, Roger G ^a   Busch, John D ^a  

^a Mondo tronics Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATOR TECHNOLOGY; COMPARATIVE PERFORMANCE; CONTROL METHODS; DESIGN LIMITATIONS; FUTURE SPACECRAFT; MICRO ELECTROMECHANICAL SYSTEM (MEMS); SPACECRAFT APPLICATION; SPACECRAFT COMPONENTS;

COMMERCE; MEMS; MICROACTUATORS; TECHNOLOGY;

SPACECRAFT;

EID: 9644268310     PISSN: 0007084X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (41)

1. A. Pisano, "Resonant-Structure Micromotors" Proceedings IEEE Micro Electro Mechanical Systems, Salt Lake City, UT, USA, p. 44, 1989.
2. K. Yanagisawa, H. Kuwano, A. Tago, "An Electromagnetically Driven Microvalve", The 7th International Congress on Solid-State Sensors and Actuators, p. 102, 1993.
3. M. Mehregany, P. Nagarkar, S.D. Senturia and J.H. Lang, "Operation of Microfabricated harmonic and Ordinary Side-drive Motors", Proceedings IEEE Micro Electro Mechanical Systems, Napa Valley, CA, USA, p. 1, 1990.
4. Y-C tai, L-S Fan and R.S. Muller, "IC-Processed Micro-motors: Design, Technology and Testing", Proceedings IEEE Micro Electro Mechanical Systems, Salt Lake City, UT, USA, p. 1, 1989.
5. S.C. Jacobsen, R.H. Price, J.E. Wood, T.H. Rytting and M. Rafaelof, "The Wobble Motor: An Electrostatic, Planetary-Armature, Microactuator", Proceedings IEEE Micro Electro Mechanical Systems, Salt Lake City, UT, USA, p. 17 1989.
6. T. Ohnstein. T. Fukiura, J. Ridley and U. Bonne, "Micromachined Silicon Microvalve", Proceedings IEEE Micro Electro Mechanical Systems, Napa Valley, CA, USA, p. 95, 1990.
7. L.Y. Chen, S.L. Zhang, J.J. Yao, D.C. Thomas and N.C. MacDonald, "Selective Chemical Vapor Deposition of Tungsten for Microdynamic Structures", Proceedings IEEE Micro Electro Mechanical Systems, Salt Lake City, UT, USA, p82, 1989.
8. N. Nakajima, K. Ogawa and I. Fujimasa, "Study on Micro Engines, Miniaturising Stirling Engines for Actuators and Heatpumps", Proceedings IEEE Micro Electro Mechanical Systems, Salt Lake City, UT, USA, p. 145, 1989.
9. W. Benecke and W. Riethmüller, "Applications of Silicon-Microactuators Based on Bimorph Structures", Proceedings IEEE Micro Electro Mechanical Systems, Salt Lake City, UT, USA, p. 116, 1989.
10. M. Parameswaran, et al, "CMOS Electrothermal Microactuators", Proceedings IEEE Micro Electro Mechanical Systems, Napa Valley, CA, USA, p. 128, 1990.
11. Product Literature for High Output Paraffin Linear Motors, Starsys Research, Boulder, CO, USA, c. 1993.
12. M.J. Zdeblick, et al, "Thermopneumatically actuated microvalves and integrated electro-fluidic circuits", Product literature from Redwood Micro systems, Menlo Park, CA, USA, c 1993.
13. L. Lin, A.P. Pisano and A.P. Lee, "The Microbubble Power Actuator -Transducers '91", Proceedings of the IEEE Conference on Solid-State Sensors and Actuators, San Francisco, CA, USA, p. 1041, 1991.
14. S. Brand, "New Applications of Piezo-electric Acluators "Actuator 92, 3rd International Conference on New Actuators, Bremen, Germany, p. 59, 1992.
15. M. Esashi, S. Shoji and A. Nakano, "Normally Close Microvalve and Micropump Fabricated on a Silicon Wafer", Proceedings IEEE Micro Electro Mechanical Systems, Salt Lake City, UT, USA, p. 29, 1989.
16. R. Petrucci and K. Simmons, "An Introduction to Piezoelectric Crystals", Sensors Magazine, Helmers Publications, Peterborough, NH, US A, p. 26, May 1994.
17. J.D. Busch, W.E. Purdy and A.D. Johnson, "Development of a Non-explosive Release Device for Aerospace Applications", Proceedings of the 26th Aerospace Mechanisms Symposium, May 1992.
18. R.G. Gilbertson, Muscle Wires Project Book, 3rd edition, Mondo-tronics Inc., San Anselmo, CA, USA, pp. 3-46, 1994.
19. R. Jebens, W. Trimmer and J. Walker, "Micro Actuators for Aligning Optical Fibers", Proceedings IEE Micro Electro Mechanical Systems, Salt Lake City, UT, USA, p. 35, 1989.
20. C.A. Ray, C.L. Sloan.A.D. Johnson, J.B. Busch and B.R. Petty, "A Silicon-Based Shape Memory Alloy Microvalve", Proceedings of the Spring Materials Research Society Conference, San Francisco, CA, USA, 1992.
21. Private conversation with Dr. Valery V. Martiynov, Institute of Metal Physics, National Academy of Sciences, Kiev, Ukraine, August 18, 1994.
22. L. Kiesewetter, "Terfenol in Linear Motor", 2nd International Conference on Giant Magnetostrictive Alloys, Marbella, Spain, 1988.
23. N. Lhermet, F. Claeyssen, P. Wendling and G. Grosso, "Actuators Based on Biased Magnetostrictive Rare Earth-Iron Alloys", Actuator 92, 3rd International Conference on New Actuators, Bremen, Germany, p. 133, 1992.
24. A.E. Clark, "High Power Magnetostrictive Transducer Materials", Actuator 92, 3rd International Conference on New Actuators, Bremen, Germany, p. 127, 1992.
25. R.C Roth, "The Elastic Wave Motor-A Versatile Terfenol Driven, Linear Actuator with High Force and Great Precision", Actuator 92, 3rd International Conference on New Actuators, Bremen, Germany, p. 138, 1992.
26. A. Hosseini-Sianaki, W.A. Bullough, R. Firoozian, J. Makin, A.R. Johnson and X. Shi, "The High Speed Electrorheological Catch-Characteristics, Dimensional Considerations and Non Linear Operational Aspects", Actuator 92, 3rd International Conference on New Actuators, Bremen, Germany, p. 118, 1992.
27. J.L. Sproston and R. Stanway, "Electrorheological Fluids in Vibration Isolation", Actuator 92, 3rd International Conference on New Actuators, Bremen, Germany, p. 116, 1992.
28. D.A. Brooks, "A Practical High Speed ER Actuator", Actuator 92, 3rd International Conference on New Actuators, Bremen, Germany, p. 110, 1992.
29. G.J. Monkman, "Solid Dielectrophoretic Electrorheological Enhancement", Actuator 92, 3rd International Conference on New Actuators, Bremen, Germany, p. 123, 1992.
30. H. Block, "The Nature, Action and Applications of ER Fluids", Actuator 92, 3rd International Conference on New Actuators, Bremen, Germany, p. 105 1992.
31. A. Richter and H. Sandmaier, "An Electrohydrodynamic Micropump", Proceedings IEEE Micro Electro Mechanical Systems, Napa Valley, CA, USA, p. 99, 1990.
32. R.E. Pelrine, "Room temperature, Open-Loop Levitation of Microdevices Using Diamagnetic Materials", Proceedings IEEE Micro Electro Mechanical Systems, Napa Valley, CA, USA, p. 34, 1990.
33. Y. Kim, M. Katsurai and H. Funita, "A Proposal for a Superconducting Actuator Using Meissner Effect", Proceedings IEEE Micro Electro Mechanical Systems, Salt Lake City, UT, USA, p. 107, 1989.
34. I.J. Busch-Vishniac, "The Case for Magnetically Driven Microactuators", Sensors and Actuators, A33, p. 207, 1992.
35. Ibid,.
36. H. Jerman, "Electrically Activated, Normally-Closed Diaphragm Valves", Transducers '91, Proceedings of the IEEE Conference on Solid-State Sensors and Actuators, San Francisco, CA, USA, p. 1045, 1991.
37. Product literature for Silicon Microvalves, Redwood MicroSystems, Menlo Park, CA, USA, c. 1993.
38. M. Esashi, S. Shoji and A. Nakano, "Normally-Closed Microvalve and Micropump Fabricated on Silicon Wafer", Sensors and Actuators, Vol.20, nos 1 and 2, 1989.
39. W.P. Robbins, D.L. Polla, T. Tamagawa, D.E. Glumac and J.W. Judy, "Linear Motion Microactuators Using Piezoelectric Thin Films", Transducers '91, Proceedings of the IEEE Conference on Solid-State Sensors and Actuators, San Francisco, CA, USA, p. 55, 1991.
40. CA. Ray, CL. Sloan, A.D. Johnson, J.B. Busch and B.R. Petty, "A Silicon-Based Shape Memory Alloy Microvalve", Proceedings of the Spring Materials Research Society Conference, San Francisco, CA, USA, 1992.
41. $8, 800 per kilogram. D.E. Hinton, Shuttle Glow-Exploring Space, Scientific American Special Issue, Jonathan Piel, ed., p. 34, 1990.