Laser grooving of Al2O3 plate by a pulsed Nd:YAG laser: Characteristics and application to the manufacture of gas sensors array heater

Materials Science and Engineering: A

Volumn 435-436, Issue , 2006, Pages 418-424

  Bai, Zikui ^a   Wang, Aihua ^a   Xie, Changsheng ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Alumina; Assisting gas; Laser grooving; RuO2 buried heater

Indexed keywords

CHEMICAL SENSORS; HEAT AFFECTED ZONE; LASER PULSES; NITROGEN; OPTICAL MICROSCOPY; OXYGEN; SCANNING ELECTRON MICROSCOPY; SOLID STATE LASERS; SURFACE TREATMENT;

GAS SENSOR ARRAY HEATER; LASER GROOVING; LASER PULSE FREQUENCY; LASER PULSE PEAK ENERGY; RUTHENIUM OXIDE-BURIED HEATER;

ALUMINA;

ALUMINA; CHEMICAL SENSORS; HEAT AFFECTED ZONE; LASER PULSES; NITROGEN; OPTICAL MICROSCOPY; OXYGEN; SCANNING ELECTRON MICROSCOPY; SOLID STATE LASERS; SURFACE TREATMENT;

EID: 33748907005     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2006.08.015     Document Type: Article

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