Surface machining characteristics of sapphire with fifth harmonic YAG laser pulses

Vacuum

Volumn 73, Issue 3-4, 2004, Pages 661-666

  Horisawa, Hideyuki ^a   Emura, Hajime ^a   Yasunaga, Nobuo ^a  

^a TOKAI UNIVERSITY   (Japan)

Author keywords

Fifth harmonic generation pulses; Laser machining; Microfabrication; Sapphire

Indexed keywords

CARBON DIOXIDE LASERS; CORROSION RESISTANCE; EXCIMER LASERS; LASER BEAMS; LASER PULSES; MACHINING; NEODYMIUM LASERS; SURFACE ROUGHNESS;

LASER MACHINING; MICROFABRICATION;

SAPPHIRE;

EID: 1842477770     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.12.065     Document Type: Conference Paper

References (6)

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