Cathodoluminescence properties of silicon nanocrystallites embedded in silicon oxide thin films

Journal of Luminescence

Volumn 80, Issue 1-4, 1998, Pages 247-251

  Inokuma, T ^a   Kurata, Y ^a   Hasegawa, S ^a  

^a KANAZAWA UNIVERSITY   (Japan)

Author keywords

Cathodoluminescence; Electron beam irradiation; Plasma CVD; Silicon nanocrystallite

Indexed keywords

EID: 0347334829     PISSN: 00222313     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-2313(98)00106-9     Document Type: Article

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