INFRARED IMAGING USING MICROCANTILEVERS

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 1996-U, Issue , 1996, Pages 67-75

  Oden, Patrick I ^b   Datskos, Panos G ^b   Thundat, Thomas G ^a   Wachter, Eric A ^a   Warmack, Robert J ^b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF TENNESSEE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; GAS TURBINES; INFRARED DETECTORS; MEMS; MICROCHANNELS; THERMOGRAPHY (IMAGING);

BI-MATERIAL CANTILEVER; INFRA-RED SENSOR; INFRARED ADSORPTION; INFRARED SENSOR; LASER DEFLECTION; MICRO-CANTILEVERS; MICRO-MECHANICAL; OPTICAL DEFLECTION; PIEZO-RESISTIVE; THERMAL MASS;

GOLD COATINGS;

EID: 58649097991     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1996-1338     Document Type: Conference Paper

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