Crystallized TiO2 film growth on unheated substrates by pulse-powered magnetron sputtering

Thin Solid Films

Volumn 515, Issue 2 SPEC. ISS., 2006, Pages 627-630

  Kamei, Masayuki ^a   Ishigaki, Takamasa ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Low temperature crystallization; Photocatalytic properties; Sputtering; TiO2

Indexed keywords

CRYSTALLIZATION; MAGNETRON SPUTTERING; OPTICAL SYSTEMS; PHOTOCATALYSIS; PLASMAS; THERMAL EFFECTS; THIN FILMS;

LOW TEMPERATURE CRYSTALLIZATION; PHOTOCATALYTIC PROPERTIES; TIO2;

TITANIUM DIOXIDE;

EID: 33748780904     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.224     Document Type: Article

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