Energy variation of micro-cracking on single crystal silicon

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6344 I, Issue , 2006, Pages

  Fang, F Z ^a   Liu, Y C ^b  

^a TIANJIN UNIVERSITY   (China)

^b SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

Brittle to ductile transition; Micro machining; Nano indentation; Silicon

Indexed keywords

INDENTATION; MICROCRACKING; MICROMACHINING; SINGLE CRYSTALS; SURFACE STRUCTURE;

BRITTLE-TO-DUCTILE TRANSITION; NANO INDENTATION; SINGLE CRYSTAL SILICON; SURFACE CRACKS;

SEMICONDUCTING SILICON;

EID: 33748701921     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.694415     Document Type: Conference Paper

References (10)

1. Fang, F. Z. and Venkatesh, V. C., 1998, Diamond Cutting of Silicon with Nanometric Finish, CIRP Annals, Vol 47/1, pp 45-49.
2. Lawn, B., 1993, Fracture of Brittle Solids, Cambridge University Press, UK.
3. Fang, F. Z. and Chcn, L., 2000, Ultra-precision cutting for ZKN glass, CIRP Annals, Vol 49/1, pp 17-20.
4. Jang, J., Lance, M. J., Wen, S., Tsui, T. Y., Pharr, G. M., 2004, Indentation-induced Phase Transformations in Silicon: Influences of Load, Rate, and Indenter Angle on the Transformation Behavior, Acta Materialia, 53: 1759-1770.
5. Bhushan, B., Li, X., 1997, Micromechanical and Tribological Characterization of Doped Single-crystal Silicon and Polysilicon Films for Microelectromechanical Systems Devices, Journal of Materials Research, 12:54-63.
6. Fang, F. Z., Wu, H.,Liu, Y. C., 2005, Modeling and Investigation on Machining Mechanism of Nano-cutling Monocrystalline Silicon, InternationalJournal of Machine Tools and Manufacture, Vol. 45, pp1681-1686.
7. Fang, F. Z., Liu, Y. C., 2004, On Minimum Exit-burr in Microcutting, Journal of Micromechanics and Microengineering, Vol. 14, pp 984-988.
8. Fang, F. Z., Wu, H., Liu, X. D., Liu, Y. C., and Ng, S. T., 2003, Tool Geometry Study in Micromachining, Journal of Micromechanics and Microengineering, Vol 13, pp 726-731.
9. Yan, J., 2004, Laser Micro-Raman Spectroscopy of Single-point Diamond Machined Silicon Substrates, Journal of Applied Physics, Vol. 95, pp 2094-2100.
10. Fang, F. Z., ct al, 2005, Tool-based Micro Machining and Applications in MEMS, MEMS/NEMS Handbook: Techniques and Applications, edited by C. T. Leondes, published by Kluwer Academic Press, Massachusetts, USA, Vol III, pp 63-126.